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simulation model of the nonideally manufactured and assembled grating interferometer system  (ZEMAX Development Corporation)

 
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    Structured Review

    ZEMAX Development Corporation simulation model of the nonideally manufactured and assembled grating interferometer system
    Four-grating <t>interferometer</t> system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.
    Simulation Model Of The Nonideally Manufactured And Assembled Grating Interferometer System, supplied by ZEMAX Development Corporation, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/simulation model of the nonideally manufactured and assembled grating interferometer system/product/ZEMAX Development Corporation
    Average 90 stars, based on 1 article reviews
    simulation model of the nonideally manufactured and assembled grating interferometer system - by Bioz Stars, 2026-06
    90/100 stars

    Images

    1) Product Images from "Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System"

    Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

    Journal: Sensors (Basel, Switzerland)

    doi: 10.3390/s19102409

    Four-grating interferometer system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.
    Figure Legend Snippet: Four-grating interferometer system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.

    Techniques Used:

    Definition of coordinate systems. The CS O g i X g i Y g i Z g i fixed to the CS O l X l Y l Z l represents the grating of the grating interferometer #i, and the CS O E i X E i Y E i Z E i fixed to the CS O s X s Y s Z s represents encoder #i. The Euler angles (z-y-x extrinsic) between the CS O g i X g i Y g i Z g i and the CS O l X l Y l Z l is ( t x i , t y i , t z i ) . The red arrows represent the typical internal and external effective optical path of the encoder. Points A and C represent the refraction points of the measuring beams, and point B represent the diffraction spot.
    Figure Legend Snippet: Definition of coordinate systems. The CS O g i X g i Y g i Z g i fixed to the CS O l X l Y l Z l represents the grating of the grating interferometer #i, and the CS O E i X E i Y E i Z E i fixed to the CS O s X s Y s Z s represents encoder #i. The Euler angles (z-y-x extrinsic) between the CS O g i X g i Y g i Z g i and the CS O l X l Y l Z l is ( t x i , t y i , t z i ) . The red arrows represent the typical internal and external effective optical path of the encoder. Points A and C represent the refraction points of the measuring beams, and point B represent the diffraction spot.

    Techniques Used:

    ( a ) 5-DOF experimental scheme. ( b ) 5-DOF experimental device. HSPMI is the commercial laser interferometer. Red lines indicate commercial laser interferometer system, and dotted lines indicate hybrid interferometer system.
    Figure Legend Snippet: ( a ) 5-DOF experimental scheme. ( b ) 5-DOF experimental device. HSPMI is the commercial laser interferometer. Red lines indicate commercial laser interferometer system, and dotted lines indicate hybrid interferometer system.

    Techniques Used:



    Similar Products

    simulation model of the nonideally manufactured and assembled grating interferometer system  (ZEMAX Development Corporation)
    90
    ZEMAX Development Corporation simulation model of the nonideally manufactured and assembled grating interferometer system
    Four-grating <t>interferometer</t> system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.
    Simulation Model Of The Nonideally Manufactured And Assembled Grating Interferometer System, supplied by ZEMAX Development Corporation, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/simulation model of the nonideally manufactured and assembled grating interferometer system/product/ZEMAX Development Corporation
    Average 90 stars, based on 1 article reviews
    simulation model of the nonideally manufactured and assembled grating interferometer system - by Bioz Stars, 2026-06
    90/100 stars
    		  Buy from Supplier
    simulation model of the grating interferometer  (ZEMAX Development Corporation)
    90
    ZEMAX Development Corporation simulation model of the grating interferometer
    Four-grating <t>interferometer</t> system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.
    Simulation Model Of The Grating Interferometer, supplied by ZEMAX Development Corporation, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/simulation model of the grating interferometer/product/ZEMAX Development Corporation
    Average 90 stars, based on 1 article reviews
    simulation model of the grating interferometer - by Bioz Stars, 2026-06
    90/100 stars
    		  Buy from Supplier

    Image Search Results


    Four-grating interferometer system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.

    Journal: Sensors (Basel, Switzerland)

    Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

    doi: 10.3390/s19102409

    Figure Lengend Snippet: Four-grating interferometer system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.

    Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating interferometer system in is built in the nonsequential mode of ZEMAX.

    Techniques:

    Definition of coordinate systems. The CS O g i X g i Y g i Z g i fixed to the CS O l X l Y l Z l represents the grating of the grating interferometer #i, and the CS O E i X E i Y E i Z E i fixed to the CS O s X s Y s Z s represents encoder #i. The Euler angles (z-y-x extrinsic) between the CS O g i X g i Y g i Z g i and the CS O l X l Y l Z l is ( t x i , t y i , t z i ) . The red arrows represent the typical internal and external effective optical path of the encoder. Points A and C represent the refraction points of the measuring beams, and point B represent the diffraction spot.

    Journal: Sensors (Basel, Switzerland)

    Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

    doi: 10.3390/s19102409

    Figure Lengend Snippet: Definition of coordinate systems. The CS O g i X g i Y g i Z g i fixed to the CS O l X l Y l Z l represents the grating of the grating interferometer #i, and the CS O E i X E i Y E i Z E i fixed to the CS O s X s Y s Z s represents encoder #i. The Euler angles (z-y-x extrinsic) between the CS O g i X g i Y g i Z g i and the CS O l X l Y l Z l is ( t x i , t y i , t z i ) . The red arrows represent the typical internal and external effective optical path of the encoder. Points A and C represent the refraction points of the measuring beams, and point B represent the diffraction spot.

    Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating interferometer system in is built in the nonsequential mode of ZEMAX.

    Techniques:

    ( a ) 5-DOF experimental scheme. ( b ) 5-DOF experimental device. HSPMI is the commercial laser interferometer. Red lines indicate commercial laser interferometer system, and dotted lines indicate hybrid interferometer system.

    Journal: Sensors (Basel, Switzerland)

    Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

    doi: 10.3390/s19102409

    Figure Lengend Snippet: ( a ) 5-DOF experimental scheme. ( b ) 5-DOF experimental device. HSPMI is the commercial laser interferometer. Red lines indicate commercial laser interferometer system, and dotted lines indicate hybrid interferometer system.

    Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating interferometer system in is built in the nonsequential mode of ZEMAX.

    Techniques: